Chemomechanical functionalization and patterning of silicon.

  title={Chemomechanical functionalization and patterning of silicon.},
  author={Li Yang and Yuanhang Lua and Michael Vernon Lee and Matthew R. Linford},
  journal={Accounts of chemical research},
  volume={38 12},
The chemomechanical method has emerged as a straightforward and convenient tool for simultaneously functionalizing and patterning silicon. This technique simply consists of wetting (or exposing) a silicon surface to a reactive chemical and then scribing. Scribing activates the surface and leads to monolayer formation. The properties of the monolayers are dependent on the reactive chemicals used, and mixed monolayers and funtionalized monolayers are easily produced with mixed chemicals or alpha… CONTINUE READING