Chemical sensing with micromolded plastic microcantilevers

  title={Chemical sensing with micromolded plastic microcantilevers},
  author={A. W. McFarland and J. S. Colton},
  journal={Journal of Microelectromechanical Systems},
This paper describes microcantilever sensors produced via injection molding. The injection mold design is novel in that it employs one floating and one fixed mold half, hence only necessitating high flatness on two surfaces (e.g., the mating surfaces of the mold), whereas the remainder of the mold can be machined to only moderate tolerances. The mold holds a sub-100 nanometer flatness error over the entire mold mating surfaces, needed to produce micro- and nanoscale parts. Micrometer-scale… CONTINUE READING