Chemical kinetics and energy transfer in moderate pressure H2 plasmas used in diamond MPACVD processes

@article{Hassouni1999ChemicalKA,
  title={Chemical kinetics and energy transfer in moderate pressure H2 plasmas used in diamond MPACVD processes},
  author={K. Hassouni and A. Gicquel and M. Capitelli and J. Loureiro},
  journal={Plasma Sources Science and Technology},
  year={1999},
  volume={8},
  pages={494-512}
}
A kinetic model for moderate-pressure microwave H2 plasmas obtained in diamond deposition reactors is presented. This model involves three groups of reactions which describe the vibrational kinetics of H2, the chemistry of H2 and H electronically excited states and the groundstate species kinetics, respectively. The set of species kinetic equations resulting from this model, coupled to the electron Boltzmann equation and the total energy equation were solved under a quasi-homogenous plasma… Expand
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References

SHOWING 1-10 OF 54 REFERENCES
...
1
2
3
4
5
...