Characterizing fruit fly flight behavior using a microforce sensor with a new comb-drive configuration

@article{Sun2005CharacterizingFF,
  title={Characterizing fruit fly flight behavior using a microforce sensor with a new comb-drive configuration},
  author={Yu Sun and S. N. Fry and D. P. Potasek and D. J. Bell and B. P. Nelson},
  journal={Journal of Microelectromechanical Systems},
  year={2005},
  volume={14},
  pages={4-11}
}
This paper reports a MEMS microforce sensor with a novel configuration of bulk micromachined differential triplate comb drives that overcomes the difficulty of electrically isolating the two stationary capacitor comb sets in bulk micromachining. A high-yield fabrication process using deep-reactive ion etching (DRIE) on silicon-on-insulator (SOI) wafers and only three lithographic masks was utilized to construct the high aspect ratio devices. The process features dry release of both suspended… CONTINUE READING

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