Characterizing dielectric properties of ultra-thin films using superconducting coplanar microwave resonators.

  title={Characterizing dielectric properties of ultra-thin films using superconducting coplanar microwave resonators.},
  author={Nikolaj G. Ebensperger and Benedikt Ferdinand and Dieter Koelle and Reinhold Kleiner and Martin Dressel and Marc Scheffler},
  journal={The Review of scientific instruments},
  volume={90 11},
We present an experimental approach for cryogenic dielectric measurements on ultrathin insulating films. Based on a coplanar microwave waveguide design, we implement superconducting quarter-wave resonators with inductive coupling, which allows us to determine the real part ε1 of the dielectric function at gigahertz frequencies and sample thicknesses down to a few nanometers. We perform simulations to optimize resonator coupling and sensitivity, and we demonstrate the possibility to quantify ε1… 

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