Characterizations of Thin Tungsten Films Deposited on Polyimide, Si(111) and SiO2 by Direct-Current Magnetron Sputtering

@inproceedings{Zhang2016CharacterizationsOT,
  title={Characterizations of Thin Tungsten Films Deposited on Polyimide, Si(111) and SiO2 by Direct-Current Magnetron Sputtering},
  author={Rui Zhang and Yu-jia Liu and Yan Wang and Zhenxuan Huo and Bo Du and Hui Zhong and Yu Shi},
  year={2016}
}