Characterization of sidewall roughness inside porous anodic alumina template holes by scanning electron microscopy

Abstract

Resist line edge roughness (LER) and sidewall roughness of micro/nano structures are becoming important issues of increasing concern in the sub-100 nm fabrication regime due to their critical impact on device performance. LER and sidewall roughness metrology is used to monitor individual nanostructure fabrication. Porous anodic alumina (PAA) membranes are… (More)

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Cite this paper

@article{Han2011CharacterizationOS, title={Characterization of sidewall roughness inside porous anodic alumina template holes by scanning electron microscopy}, author={Guoqiang Han and Shu Chen and Dong Zhang}, journal={2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems}, year={2011}, pages={1056-1059} }