Characterization of microfabriacted multilayered nearfield cantilever array


The nearfield optical probe array was fabricated using various microfabrication techniques such as isotropic etching of Si, silicon oxide and silicon nitride in addition to anisotropic etching of Si using alkaline solution. The nanosize oxide aperture was fabricated using diluted hydrofluoric acid solution and the nanosize oxide aperture with 100 nm… (More)


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@article{Shrestha2009CharacterizationOM, title={Characterization of microfabriacted multilayered nearfield cantilever array}, author={Surendra Lal Shrestha and Seong Soo Choi and D. W. Nathan Kim and M. S. Park}, journal={2009 First Asian Himalayas International Conference on Internet}, year={2009}, pages={1-5} }