Characterization of dynamic friction in MEMS-based microball bearings

  title={Characterization of dynamic friction in MEMS-based microball bearings},
  author={Ta-Wei Lin and Alireza Modafe and Benjamin Shapiro and Reza Ghodssi},
  journal={IEEE Transactions on Instrumentation and Measurement},
Rolling element bearing is a well-known concept in macroscale machinery applications. They are prospective candidates for friction reduction in microelectromechanical system (MEMS), as well as for providing stable, robust support for moving micromechanisms. The characteristics of rolling element bearings need to be investigated to facilitate their applications in MEMS. It is well understood that the measured data on the macroscale cannot be directly applied to the microscale. This paper… CONTINUE READING
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