Characterization of a molybdenum oxide sputtered thin film as a gas sensor

@inproceedings{Ferroni1997CharacterizationOA,
  title={Characterization of a molybdenum oxide sputtered thin film as a gas sensor},
  author={Matteo Ferroni and Vincenzo Guidi and Giuliano Martinelli and Paolo Nelli and Michele Sacerdoti and Giorgio Sberveglieri},
  year={1997}
}
We report about preparation and characterization of sputtered MoO3 thin film as sensing layer for gas detection. We show its capability to detect CO concentrations lower than 10 ppm in wet air, a feature that allows direct usage of this material for environmental monitoring. The research also highlights some criteria for selecting a suitable material and shows which features are important for a thin film to be a good candidate as a chemical sensor. 

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