Characterization of Nd:Y3Al5O12 thin films grown on various substrates by pulsed laser deposition

@inproceedings{Ezaki1996CharacterizationON,
  title={Characterization of Nd:Y3Al5O12 thin films grown on various substrates by pulsed laser deposition},
  author={Mizunori Ezaki and Minoru Obara and Hiroshi Kumagai and K{\^o}ichi Toyoda},
  year={1996}
}
  • Mizunori Ezaki, Minoru Obara, +1 author Kôichi Toyoda
  • Published 1996
  • Physics
  • Epitaxial Nd‐doped yttrium aluminum garnet (NdxY3−xAl5O12 or Nd:YAG) films have been grown on various substrates by pulsed laser deposition for the purpose of fabricating diode‐pumped waveguide lasers. The films were characterized by Rutherford backscattering, x‐ray diffraction, atomic force microscopy, and photoluminescence measurements. Nd:YAG films on (100) silicon substrate with a large lattice mismatch show oriented stoichiometric growth. On the other hand, Nd:YAG films on garnet… CONTINUE READING

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