Characterization of Integrated Planar Photonic Crystal Circuits Fabricated by a CMOS Foundry

Integrated planar photonic crystal circuits in silicon on insulator were fabricated with a single-etch-step process by a foundry using complementary metal-oxide-semiconductor processing techniques. The devices studied integrate three key elements: i) input/output grating couplers consisting of 2D uniform arrays of holes, ii) single transverse electric (TE… CONTINUE READING