Characterization of Barium Strontium Titanate Films Using XRD

Abstract

Barium Strontium Titanate (BST) materials, both in target (bulk) and thin film (6OOA12OOA) form, were characterized using x-ray diffraction (XRD). Film structure as a function of composition, processing parameters and underlying substrate was determined. Differences in the lattice parameter between bulk and sputtered film form were observed, with the… (More)

16 Figures and Tables

Topics

  • Presentations referencing similar topics