Characterization of Barium Strontium Titanate Films Using XRD


Barium Strontium Titanate (BST) materials, both in target (bulk) and thin film (6OOA12OOA) form, were characterized using x-ray diffraction (XRD). Film structure as a function of composition, processing parameters and underlying substrate was determined. Differences in the lattice parameter between bulk and sputtered film form were observed, with the… (More)

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