Characterization and reduction of spectral distortions in silicon-on-insulator integrated Bragg gratings.

@article{Simard2013CharacterizationAR,
  title={Characterization and reduction of spectral distortions in silicon-on-insulator integrated Bragg gratings.},
  author={Alexandre D. Simard and Guillaume Beaudin and Vincent Aimez and Yves Painchaud and Sophie LaRochelle},
  journal={Optics express},
  year={2013},
  volume={21 20},
  pages={23145-59}
}
A major issue in the fabrication of integrated Bragg grating filters in highly confined waveguides is the average effective index fluctuations caused by waveguide dimension variations. Lateral variations are caused by the sidewall roughness created during the etching process while vertical variations are coming from the wafer silicon layer thickness non-uniformity. Grating spectral distortions are known to result solely from the low spatial frequency components of these variations. As a result… CONTINUE READING
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