Characterization and Metrology for ULSI Technology : 1998 International Conference

@inproceedings{Rich2008CharacterizationAM,
  title={Characterization and Metrology for ULSI Technology : 1998 International Conference},
  author={Collin A. Rich and Kensall D. Wise},
  year={2008}
}
Integrated microvalves are needed for a broad range of semiconductor-processing-related applications. These include precision mass microflow controllers (laFCs) for dry etch systems, miniature gas chromatography systems for real-time monitoring, point-of-use semiconductor process reactant generators, and compact control systems for minienvironments. This paper reports a pneumatically actuated, integrated silicon microvalve, which was developed as a forerunner to an 8b }.tFC intended for the… CONTINUE READING
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