Characteristics of rf-produced, high-density plasma with very small diameter

@inproceedings{Nakagawa2014CharacteristicsOR,
  title={Characteristics of rf-produced, high-density plasma with very small diameter},
  author={Toshiki Nakagawa and Shunjiro Shinohara and Daisuke Kuwahara and Akira Mishio and Hiroaki Fujitsuka},
  year={2014}
}
To investigate characteristics of helicon plasma with a very small diameter, we have developed the Small Helicon Device (SHD) and measured the electron density under various conditions over a wide range of radio frequencies. Using a tube with inner diameter of 20 mm, an electron density ne of ~ 10 13 cm near the antenna region was obtained with an excitation frequency f of 7 MHz, rf power Prf of ~ 1000 W, and axial magnetic field in the magnet coil region B of 560 G. In the case of an inner… CONTINUE READING

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