Characteristics and mechanical properties of titanium-containing diamond like carbon films deposited by cathodic arc evaporation.

@article{Tsai2008CharacteristicsAM,
  title={Characteristics and mechanical properties of titanium-containing diamond like carbon films deposited by cathodic arc evaporation.},
  author={Pi-Chuen Tsai and Jueh-Yu Chiang and Yen-Fei Hwang},
  journal={Journal of nanoscience and nanotechnology},
  year={2008},
  volume={8 5},
  pages={2516-21}
}
Depositions of titanium-containing diamond-like carbon (Ti-DLC) films were conducted by mixing C+ and Ti+ plasma streams originated from cathodic arc plasma sources in argon (Ar). The deposition was processed at Ti target current ranging from 20 Amp to 70 Amp. Film characteristics were investigated using Raman spectroscopy, X-ray photoelectron spectroscopy… CONTINUE READING