Characterisation of dopants distribution using electron holography and FIB-based lift-off preparation

@article{Muehle2005CharacterisationOD,
  title={Characterisation of dopants distribution using electron holography and FIB-based lift-off preparation},
  author={U. Muehle and A. Lenk and R. Weiland and H. Lichte},
  journal={Microelectronics Reliability},
  year={2005},
  volume={45},
  pages={1558-1561}
}

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