Change of the oxidation state of phosphorus in sputtered Li3±xPO4±y and Li3±xPO4±yNz films

@article{Birke1996ChangeOT,
  title={Change of the oxidation state of phosphorus in sputtered Li3±xPO4±y and Li3±xPO4±yNz films},
  author={Peter Birke and Werner Prof. Dr. Weppner},
  journal={Ionics},
  year={1996},
  volume={2},
  pages={75-79}
}
Thin Li3±xPO4±yNzLi+- electrolyte films prepared by reactive rf-magnetron sputtering of Li3PO4 incorporate a certain amount of nitrogen which is made responsible for increased Li+-conductivity as well as at least kinetic stability with lithium metal. A possible change of the oxidation state +5 of phosphorus as a result of the sputter process has not yet been considered for explanation. We have found out that it cannot be generally assumed that reactive low power rf-magnetron sputtering of… CONTINUE READING