Challenges in commercializing MEMS

@inproceedings{Peeters1997ChallengesIC,
  title={Challenges in commercializing MEMS},
  author={Eric Peeters},
  year={1997}
}
Several microelectromechanical systems have achieved commercial success. The barriers can still be formidable, though, and the path to success is often much different for MEMS than it was for mainstream semiconductors. Maturing software for comprehensive modeling and design will help in the future. The entire field of MEMS has been enabled by the batch fabrication methods established in the semiconductor industry. We cannot predict the market success of MEMS based products, however, by blindly… CONTINUE READING

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