Ceramic capacitive pressure sensor based on LTCC technology

  title={Ceramic capacitive pressure sensor based on LTCC technology},
  author={Josep M. Fern{\'a}ndez-Sanju{\'a}n and N. Bonet and J Gonzalez Rodriguez and F. M. Ramos and Javier J. Sieiro and J.M. Lopez-Villegas and Neus Vidal and Albert Cirera},
  journal={2013 Spanish Conference on Electron Devices},
This work is focused on the design and fabrication of a capacitive ceramic pressure sensor using LTCC technology. The multilayer technology helps us to tailor the thickness of the flexible membrane depending on the pressure range we are working in. In the bottom part of the substrate a entire signal conditioning electronics is located. An integrated circuit suitably chosen for this application measures the capacitance and converts it to a proportional voltage to the pressure. The present paper… 

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