Ceramic capacitive pressure sensor based on LTCC technology

@article{FernndezSanjun2013CeramicCP,
  title={Ceramic capacitive pressure sensor based on LTCC technology},
  author={Josep M. Fern{\'a}ndez-Sanju{\'a}n and N. Bonet and J Gonzalez Rodriguez and F. M. Ramos and Javier J. Sieiro and J.M. Lopez-Villegas and Neus Vidal and Albert Cirera},
  journal={2013 Spanish Conference on Electron Devices},
  year={2013},
  pages={111-114}
}
This work is focused on the design and fabrication of a capacitive ceramic pressure sensor using LTCC technology. The multilayer technology helps us to tailor the thickness of the flexible membrane depending on the pressure range we are working in. In the bottom part of the substrate a entire signal conditioning electronics is located. An integrated circuit suitably chosen for this application measures the capacitance and converts it to a proportional voltage to the pressure. The present paper… 

Figures and Tables from this paper

Valuation on MEMS Pressure Sensors and Device Applications
The MEMS pressure sensor has been introduced and presented in this paper. The types of pressure sensor and its theory of operation are also included. The latest MEMS technology, the fabrication
Optical pressure sensors for harsh environment
This paper deals with the design, manufacturing, and evaluation of a new optical pressure sensor produced by using Low Temperature Co-fired Ceramic technology. This optical sensor is designed for the

References

SHOWING 1-4 OF 4 REFERENCES
Capacitive pressure sensor in post-processing on LTCC substrates
ADVANCED LTCC PROCESSES USING PRESSURE ASSISTED SINTERING
Low Temperature Cofired Ceramics (LTCC) offer a wide range of possibilities to realize multilayer circuits with an almost unlimited number of layers. It permits the integration of passive components
A Hermetic Thick Film Screen-Printed Ceramic Cavity for Harsh Environment Sensing Applications
  • C.B. Sippola, C. Ahn
  • Materials Science, Engineering
    IEEE Transactions on Components and Packaging Technologies
  • 2007
In this work, a ceramic thick film cavity with screen-printed diaphragm has been designed, fabricated, and fully characterized as the foundation for harsh environment pressure microsensing
Theory of Plates and Shells
PROF. TIMOSHENKO is one of the outstanding exponents of the mathematical theory of elasticity and of the application of this theory to a variety of practical problems. He has written on these topics