Cavity-Waveguide Coupling Engineered High Sensitivity Silicon Photonic Crystal Microcavity Biosensors With High Yield

Abstract

We present a high yield and high sensitivity on-chip biosensing system by combining subwavelength grating coupling and high sensitivity photonic crystal microcavity side coupled to a photonic crystal waveguide. 80% yield of working devices was experimentally demonstrated for sensitivity engineered L13 photonic crystal microcavities and 70% for L21 photonic… (More)

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