Cathodoluminescence spectroscopy of metal–semiconductor interface structures

@inproceedings{Brillson1988CathodoluminescenceSO,
  title={Cathodoluminescence spectroscopy of metal–semiconductor interface structures},
  author={Leonard Jack Brillson and R. E. Viturro and Jonathan Lincoln Shaw and Herbert W. Richter},
  year={1988}
}
Low‐energy cathodoluminescence spectroscopy (CLS) is a powerful new technique for characterizing the electronic structure of semiconductor surfaces and ‘‘buried’’ metal–semiconductor interfaces. This extension of a more conventional electron microscopy technique provides information on localized states, deep‐level defects, and band structure of new compounds at interfaces below the free solid surface. Specifically, CLS provides direct identification of metal‐induced interface states which… CONTINUE READING

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