Carbon nanotube thin film transistors fabricated by an etching based manufacturing compatible process.

  title={Carbon nanotube thin film transistors fabricated by an etching based manufacturing compatible process.},
  author={Boyuan Tian and Xuelei Liang and Jiye Xia and Han Zhang and Guodong Dong and Qi Huang and Lian-Mao Peng and Sishen Xie},
  volume={9 13},
Carbon nanotube thin film transistors (CNT-TFTs) have been regarded as strong competitors to currently commercialized TFT technologies. Though much progress has been achieved recently, CNT-TFT research is still in the stage of laboratory research. One critical challenge for commercializing CNT-TFT technology is that the commonly used device fabrication method is a lift-off based process, which is not suitable for mass production. In this paper, we report an etching based fabrication process for… CONTINUE READING

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