Carbon nanotube technologies for future ULSI via interconnects

@inproceedings{Awano2005CarbonNT,
  title={Carbon nanotube technologies for future ULSI via interconnects},
  author={Yuji Awano},
  booktitle={SPIE OPTO},
  year={2005}
}
We demonstrate the advantages of carbon nanotubes (CNTs) for ULSI interconnections. which we believe that it must be one of the most promising applications for metallic carbon nanotubes. We report present status of CNT material technologies and the potential of metallic CNT vias for future ULSI interconnections. 

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