Carbon nanotube probes for three-dimensional critical-dimension metrology

@inproceedings{Park2006CarbonNP,
  title={Carbon nanotube probes for three-dimensional critical-dimension metrology},
  author={Byong-Chon Park and Sang-Jung Ahn and Jun-Hyuk Choi and Kap Yong Jung and Won young Song},
  booktitle={SPIE Advanced Lithography},
  year={2006}
}
We fabricate three kinds of carbon nanotube (CNT) probes to be employed in critical dimension atomic force microscope (CD-AFM). Despite unique advantages in its size and hardness, use of nanotube tip has been limited due to the lack of reproducible control of CNT orientation and its shape. We proposed that CNT alignment issues can be addressed based on the ion beam bending process, where a CNT free-standing on the apex of an AFM tip aligns itself in parallel to the FIB direction so that its… CONTINUE READING

Citations

Publications citing this paper.
SHOWING 1-2 OF 2 CITATIONS

Evaluation of carbon nanotube probes in critical dimension atomic force microscopes

  • Journal of micro/nanolithography, MEMS, and MOEMS : JM3
  • 2016
VIEW 2 EXCERPTS
CITES BACKGROUND