Capacitive-piezoelectric AlN resonators with Q>12,000

@article{Hung2011CapacitivepiezoelectricAR,
  title={Capacitive-piezoelectric AlN resonators with Q>12,000},
  author={Li-wen Hung and Clark T.-C. Nguyen},
  journal={2011 IEEE 24th International Conference on Micro Electro Mechanical Systems},
  year={2011},
  pages={173-176}
}
A “capacitive-piezo” transducer that separates a piezoelectric resonator from its electrodes via small gaps to eliminate resonator-to-electrode loss while maintaining strong electromechanical coupling [1], has enabled demonstration of a 50-MHz wine-glass disk (WGD) resonator array with Q=12,748. This is higher than exhibited by any sputtered thin-film AlN resonator measured to date at any frequency and more than 2.2× larger than previously achieved by similar devices using conventional (i.e… CONTINUE READING
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