Capacitive-piezoelectric AlN resonators with Q>12,000

  title={Capacitive-piezoelectric AlN resonators with Q>12,000},
  author={Li-wen Hung and Clark T.-C. Nguyen},
  journal={2011 IEEE 24th International Conference on Micro Electro Mechanical Systems},
A “capacitive-piezo” transducer that separates a piezoelectric resonator from its electrodes via small gaps to eliminate resonator-to-electrode loss while maintaining strong electromechanical coupling [1], has enabled demonstration of a 50-MHz wine-glass disk (WGD) resonator array with Q=12,748. This is higher than exhibited by any sputtered thin-film AlN resonator measured to date at any frequency and more than 2.2× larger than previously achieved by similar devices using conventional (i.e… CONTINUE READING
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Publications referenced by this paper.
Showing 1-8 of 8 references

Integrated micromechanical RF...,‖ 26 Sensors

C.T.-C. Nguyen
Micromachines & App. Sys. Sym., • 2009
View 1 Excerpt

Analysis of thermoelastic damping in laminated...,

S. Vengallatore
J. Micromech. Microeng., • 2005
View 1 Excerpt

Power handling and temperature coefficient studies...,

J. D. Larson, et. al
Proc., IEEE Int. Ultrasonics Sym., • 2000
View 1 Excerpt

Third-order intermodulation distortion in an optical downconverter

1998 IEEE MTT-S International Microwave Symposium Digest (Cat. No.98CH36192) • 1998
View 2 Excerpts

The aging of bulk acoustic wave resonators...,

J. R. Vig, T. R. Meeker
Proc., IEEE Freq. Control Sym., • 1991
View 1 Excerpt

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