Capacitive micromachined ultrasonic transducer with driving voltage over 100 V and vibration durability over 1011 cycles

@article{Machida2009CapacitiveMU,
  title={Capacitive micromachined ultrasonic transducer with driving voltage over 100 V and vibration durability over 1011 cycles},
  author={Shuntaro Machida and Takashi Kobayashi and Munenori Degawa and Taiichi Takezaki and Hiroki Tanaka and S. Migitaka and Kunia Hashiba and Hiroyuki Enomoto and Tatsuya Nagata and Yasuhiro Yoshimura and K. Asafusa and Kazuyuki Ishida and Shinya Sano and Miki Izumi},
  journal={TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference},
  year={2009},
  pages={2218-2221}
}
A capacitive micromachined ultrasonic transducer (CMUT) was fabricated using a standard 0.25-µm CMOS backend-of-line process. By adopting the planarization of dielectric material between the upper and lower electrodes by chemical mechanical polishing (CMP), we achieved a time-dependent dielectric breakdown (TDDB) lifetime exceeding 10 years at a DC stress voltage of 192 V. In the case of DC and AC voltage driving, we found degradation of the dielectric at the center of a membrane for the first… CONTINUE READING
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