Capacitive micromachined ultrasonic transducer (CMUT) arrays for medical imaging

@article{Caronti2006CapacitiveMU,
  title={Capacitive micromachined ultrasonic transducer (CMUT) arrays for medical imaging},
  author={Alessandro Caronti and Giosu{\`e} Caliano and Riccardo Carotenuto and Alessandro Stuart Savoia and Massimo Pappalardo and Elena Cianci and Vittorio Foglietti},
  journal={Microelectronics Journal},
  year={2006},
  volume={37},
  pages={770-777}
}
Abstract Capacitive micromachined ultrasonic transducers (CMUTs) bring the fabrication technology of standard integrated circuits into the field of ultrasound medical imaging. This unique property, combined with the inherent advantages of CMUTs in terms of increased bandwidth and suitability for new imaging modalities and high frequency applications, have indicated these devices as new generation arrays for acoustic imaging. The advances in microfabrication have made possible to fabricate, in… CONTINUE READING

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