Capacitive effect of coplanar electrodes partially outside the microchannel region for underwater microfluidic-based sensor

Abstract

This work aims to obtain the capacitance resulted from the coplanar electrode configuration meant to be used for underwater sensing application. Coplanar structure is proposed to overcome the complexity of parallel electrode microfabrication processes which require repeating process of layer deposition. Work is achieved through Finite Element Model (FEM… (More)

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Cite this paper

@inproceedings{Rahman2014CapacitiveEO, title={Capacitive effect of coplanar electrodes partially outside the microchannel region for underwater microfluidic-based sensor}, author={Mohamad Faizal Abd Rahman and Asrulnizam Abd Manaf}, year={2014} }