Capacitive detection in resonant MEMS with arbitrary amplitude of motion

Abstract

Detection of motion with parallel plate capacitors is commonly used in MEMS; small amplitude of motion is typically assumed. In this paper, we derive precise and constructive equations for the case of parallel plate capacitive detection of arbitrary amplitude of motion. These equations are solved in closed form without using a small displacement assumption… (More)

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@inproceedings{Trusov2007CapacitiveDI, title={Capacitive detection in resonant MEMS with arbitrary amplitude of motion}, author={Alexander A. Trusov and Andrei M. Shkel}, year={2007} }