Capacitive RF switches manufactured by the CMOS-MEMS technique

  title={Capacitive RF switches manufactured by the CMOS-MEMS technique},
  author={Ming-Zhi Yang and Ching-Liang Dai and Po-Jen Shih and Zung-You Tsai},
This work investigates the fabrication and characterization of a capacitive radio frequency (RF) switch using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique. The micromechanical RF switch had a high isolation and a low driving voltage. The structure of the micromechanical RF switch contains a coplanar waveguide (CPW), a suspended membrane, eight springs and four suspended inductors in series. The suspended inductors are used to enhance the… CONTINUE READING


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