Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip

@inproceedings{Dai2009CapacitiveMP,
  title={Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip},
  author={Ching-Liang Dai and Po-Wei Lu and Chienliu Chang and Cheng-Yang Liu},
  booktitle={Sensors},
  year={2009}
}
The study investigates a capacitive micro pressure sensor integrated with a ring oscillator circuit on a chip. The integrated capacitive pressure sensor is fabricated using the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The ring oscillator is employed to convert the capacitance of the pressure sensor into the frequency output. The pressure sensor consists of 16 sensing cells in parallel. Each sensing cell contains a top electrode and a lower electrode… CONTINUE READING

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