Cantilevers with integrated sensor for time-resolved force measurement in tapping-mode atomic force microscopy

  • A. F. Sarioglua
  • Published 2008


We present a micromachined cantilever with an integrated high-bandwidth resonator for direct measurement of tip-sample interaction forces in tapping-mode atomic force microscopy. Force measurements are achieved by a diffraction grating that serves as a differential displacement sensor for the tip motion relative to the cantilever body. Time-resolved tip… (More)

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