Cannes-Mandelieu , 5-7 May 2003 PARALLEL-BEAMS / LEVER ELECTROTHERMAL OUT-OF-PLANE ACTUATOR

@inproceedings{Deladi2003CannesMandelieu5,
  title={Cannes-Mandelieu , 5-7 May 2003 PARALLEL-BEAMS / LEVER ELECTROTHERMAL OUT-OF-PLANE ACTUATOR},
  author={S. Deladi and G. Krijnen and Miko Elwenspoek},
  year={2003}
}
We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combining numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and measurements are consistent if the temperature dependence of the properties of the polycrystalline Si… CONTINUE READING

References

Publications referenced by this paper.
Showing 1-5 of 5 references

Proceedings 12th MME

I. Dufour, C. Pellet
pp. 94-97 • 2001
View 1 Excerpt

Properties of crystalline silicon

R. Hull
INSPEC, ISBN 0-85296-933-3, London • 1999
View 1 Excerpt

Polycrystalline Silicon for Integrated Circuits and Displays

T. Kamins
Kluwer Academic Publishers, Boston, ISBN 0-7923-8224-2 • 1998
View 1 Excerpt

DSC-Vol

M. Chiao, L. Liwei
62/HTD-Vol.354, MEMS, ASME, pp.75-80 • 1997
View 2 Excerpts

Phys

C. J. Glassbrenner, G. A. Slack
Rev. 134, 4A, A1058-A1069 • 1964

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