CVD polycrystalline diamond high-Q micromechanical resonators

  title={CVD polycrystalline diamond high-Q micromechanical resonators},
  author={Jing Wang and J. E. Butler and D.S.Y. Hsu and T.-C. Nguyen},
  journal={Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266)},
Chemical Vapor Deposited (CVD) polycrystalline diamond material, with an acoustic velocity higher than that of polycrystalline silicon, has been utilized as the structural material for clamped-clamped beam (CC-beam) micromechanical resonators with measured resonance frequencies from 2.7 MHz to 9.8 MHz, and Q's up to 6,225-easily on par with that of previous polysilicon resonators in this frequency range. In addition to CC-beams, CVD polydiamond folded-beam /spl mu/mechanical resonators are also… CONTINUE READING
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