CO(2)-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems.

Abstract

In this article, we focus on the enormous potential of a CO(2)-laser system for rapidly producing polymer microfluidic structures. The dependence was assessed of the depth and width of laser-cut channels on the laser beam power and on the number of passes of the beam along the same channel. In the experiments the laser beam power was varied between 0 and 40… (More)

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@article{Klank2002CO2laserMA, title={CO(2)-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems.}, author={Henning Klank and Jorg P Kutter and Oliver Geschke}, journal={Lab on a chip}, year={2002}, volume={2 4}, pages={242-6} }