CMUT array modeling through free acoustic CMUT modes and analysis of the fluid CMUT interface through Fourier transform methods

@article{Ronnekleiv2005CMUTAM,
  title={CMUT array modeling through free acoustic CMUT modes and analysis of the fluid CMUT interface through Fourier transform methods},
  author={Arne Ronnekleiv},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
  year={2005},
  volume={52},
  pages={2173-2184}
}
  • Arne Ronnekleiv
  • Published 2005 in
    IEEE Transactions on Ultrasonics, Ferroelectrics…
A method for analyzing capacitive micromachined ultrasonic transducer (CMUT) arrays and arrays of elements composed of several CMUTs is proposed. It is based on a combination of a free acoustic mode description of an isolated CMUT, and the coupling of these modes to the fluid in which waves should be excited or detected through an impedance matrix that will depend on frequency. The parameters of the model describing the isolated CMUT is independent of frequency and excitation of neighbor CMUTs… CONTINUE READING
Highly Cited
This paper has 92 citations. REVIEW CITATIONS
24 Citations
34 References
Similar Papers

Citations

Publications citing this paper.
Showing 1-10 of 24 extracted citations

93 Citations

01020'07'10'13'16
Citations per Year
Semantic Scholar estimates that this publication has 93 citations based on the available data.

See our FAQ for additional information.

References

Publications referenced by this paper.
Showing 1-10 of 34 references

Derivation of a 1D CMUT model from FEM results for linear and nonlinear equivalent circuit simulations

  • A. Lohfink, P.-C. Eccardt, W. Benecke, H. Meixner
  • Proc. IEEE Ultrason. Symp., 2003, pp. 465–468.
  • 2003
1 Excerpt

Fabrication and characterization of a new capacitive micromachined ultrasonic transducer (cMUT) using polysilicon as membrane and sacrificial layer material

  • A. Buhrdorf, A. Lohfink, S. Junge, P.-C. Eccardt, W. Benecke
  • Proc. IEEE Ultrason. Symp., 2003, pp. 1951–1954.
  • 2003

Similar Papers

Loading similar papers…