CMOS monolithic metal-oxide sensor system comprising a microhotplate and associated circuitry

  title={CMOS monolithic metal-oxide sensor system comprising a microhotplate and associated circuitry},
  author={Markus Graf and D. Barrettino and Martin Zimmermann and Andreas Hierlemann and H P Baltes and Song-yop Hahn and N. Barsan and Udo Weimar},
  journal={IEEE Sensors Journal},
A gas sensor system fabricated in industrial CMOS technology is presented, which includes, for the first time, a microhotplate and the necessary driving and control circuitry on a single chip. Post-complementary-metal-oxide-semiconductor (CMOS) fabrication steps, such as micromachining of the membrane structure, the deposition of noble metal on the electrodes, and the processing of the sensitive metal-oxide layer, have been developed to be fully compatible with the industrial CMOS process… CONTINUE READING
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