CMOS fabricated large array of free standing substrate-less photonic crystal cavities for biosensing applications

In this work we present a methodology to post-process a large array of a few hundred nanometer thin photonic membranes that were fabricated using complementary metal-oxide-semiconductor (CMOS) technological platform. The post processing results in local removal of the silicon substrate and of the buried oxide (BOX), which provides a free access from both… CONTINUE READING