CMOS-compatible metallic nanostructures for visible and infrared filtering

@inproceedings{Palanchoke2014CMOScompatibleMN,
  title={CMOS-compatible metallic nanostructures for visible and infrared filtering},
  author={U. Palanchoke and S. Boutami and J. Hazart},
  booktitle={Photonics West - Optoelectronic Materials and Devices},
  year={2014}
}
  • U. Palanchoke, S. Boutami, J. Hazart
  • Published in
    Photonics West…
    2014
  • Engineering, Physics
  • Metal-Insulator-Metal (MIM) and Insulator-Metal (IM) sub-wavelength arrays are studied to perform filtering in Visible (VIS) and Near-Infrared (NIR) respectively. We investigate the MIM sub wavelength pattern using CMOS compatible materials like silicon nitride (SiN) core and aluminum (Al) metal for visible color filtering, and IM sub wavelength array with the same materials for near- infrared filtering using Rigorous Coupled Wave Analysis (RCWA). Transmission as high as 50 % is observed for… CONTINUE READING
    2 Citations
    Plasmon-based spectral filtering with metallic nanostructures for CMOS image sensors

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