CMOS-compatible graphene

  title={CMOS-compatible graphene},
  author={Stuart Thomas},
  journal={Nature Electronics},
  • Stuart Thomas
  • Published 30 November 2018
  • Materials Science
  • Nature Electronics
Complementary metal–oxide– semiconductor (CMOS)-based integrated circuits use metal interconnect wires, which are made of aluminium and, more recently, copper, to provide electrical connections between the various circuit components. As technology node scaling has continued to fit more devices per square inch of silicon, interconnect wire cross-sections have needed to shrink, leading to increased resistivity, heating and electromigration issues. Recent investigations into the use of metals with… Expand
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