CMOS-MEMS probes for reconfigurable IC’s

@article{Liu2008CMOSMEMSPF,
  title={CMOS-MEMS probes for reconfigurable IC’s},
  author={Jingfeng Liu and Mohammad Noman and J. A. Bain and T. E. Schlesinger and G. K. Fedder},
  journal={2008 IEEE 21st International Conference on Micro Electro Mechanical Systems},
  year={2008},
  pages={515-518}
}
We report on our progress on the development of CMOS-MEMS electrothermal conductive probes for memory-intensive self-configuring integrated circuits (MISCICs). The MISCIC vision is to use MEMS conductive probes to reconfigure circuits by mechanically addressing and passing current through resistance change vias embedded within the chip circuitry. Cantilevered probes are designed with 1, 4, 9, 16 and 25 mum2 areas that are plated with nickel. The vertical range of the electrothermal actuator is… CONTINUE READING