CMOS MEMS: A key technology towards the “More than Moore” era

@article{Fang2013CMOSMA,
  title={CMOS MEMS: A key technology towards the “More than Moore” era},
  author={Weileun Fang and S.-S Li and C.-L Cheng and C.-I Chang and W.-C Chen and Y.-C Liu and M. Y. Tsai and Changzheng Sun},
  journal={2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)},
  year={2013},
  pages={2513-2518}
}
The mature CMOS fabrication processes are available in many IC foundries. It is cost-effective to leverage the existing CMOS fabrication technologies to implement MEMS devices. On the other hand, the MEMS devices could also add values to the IC industry as the Moore's law reaching its limit. The CMOS MEMS could play a key role to bridge the gap between the CMOS and MEMS technologies. The CMOS MEMS also offers the advantage of monolithic integration of ICs and micro mechanical components. This… CONTINUE READING

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