Bulk disk resonator based ultrasensitive mass sensor

@article{Cagliani2009BulkDR,
  title={Bulk disk resonator based ultrasensitive mass sensor},
  author={A. Cagliani and Z. J. Davis},
  journal={2009 IEEE Sensors},
  year={2009},
  pages={1317-1320}
}
In the framework of developing an innovative label-free sensor for multiarrayed biodetecion applications, we present a novel bulk resonator based mass sensor. The sensor is a polysilicon disk which shows a Q-factor of 6400 in air at 68.8 MHz, resulting in mass resolutions down in the femtogram range. The sensor has been characterized in terms of sensitivity both for distributed mass detection, performing six consecutive depositions of e-beam evaporated Au, and localized mass detection… CONTINUE READING

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