Bulk and Surface Thermoelastic Dissipation in Micro-Hemispherical Shell Resonators

  title={Bulk and Surface Thermoelastic Dissipation in Micro-Hemispherical Shell Resonators},
  author={Logan Sorenson and Peng Shao and Farrokh Ayazi},
  journal={Journal of Microelectromechanical Systems},
Thermoelastic dissipation (TED) is a fundamental energy loss process, which bears concern in all microelectromechanical resonators. High aspect ratio (R/h) 3-D micro-hemispherical shell resonators (μHSRs) have exceptionally low stiffness and are sensitive to dissipation forces both internally and at their surfaces. TED in μHSRs originating in the bulk of the shell and near its surfaces due to asperities (roughness) is investigated. Rayleigh's inextensional solutions for the lowest frequency… CONTINUE READING
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