Bulk Mode Disk Resonator With Transverse Piezoelectric Actuation and Electrostatic Tuning


This paper presents a wine-glass bulk mode disk resonator based on a novel transverse piezoelectric actuation technique to achieve bulk mode resonance of the single crystalline silicon disk structure. The device is fabricated in a commercial microelectromechnical systems (MEMS) process, and combines reasonable quality factor and superior motional resistance… (More)


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Citations per Year

Citation Velocity: 23

Averaging 23 citations per year over the last 2 years.

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