Building the New Berkeley Microlab

  title={Building the New Berkeley Microlab},
  author={A. William Flounders and Katalin Voros},
  journal={2006 16th Biennial University/Government/Industry Microelectronics Symposium},
  • A. Flounders, K. Voros
  • Published 25 June 2006
  • Physics
  • 2006 16th Biennial University/Government/Industry Microelectronics Symposium
The University of California at Berkeley is proceeding with construction of a new nanofabrication laboratory - the CITRIS Nanolab. This new facility is a key component of the College of Engineering's CITRIS research center - the Center for Information Technology Research in the Interest of Society. The new lab will enable world class faculty research and stimulate creative partnerships with industry to address nanoscale CMOS electronics, nanoelectromechanical systems (NEMS), integration of opto… 

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