Building the New Berkeley Microlab

@article{Flounders2006BuildingTN,
  title={Building the New Berkeley Microlab},
  author={A. Flounders and K. Voros},
  journal={2006 16th Biennial University/Government/Industry Microelectronics Symposium},
  year={2006},
  pages={19-21}
}
  • A. Flounders, K. Voros
  • Published 25 June 2006
  • Engineering
  • 2006 16th Biennial University/Government/Industry Microelectronics Symposium
The University of California at Berkeley is proceeding with construction of a new nanofabrication laboratory - the CITRIS Nanolab. This new facility is a key component of the College of Engineering's CITRIS research center - the Center for Information Technology Research in the Interest of Society. The new lab will enable world class faculty research and stimulate creative partnerships with industry to address nanoscale CMOS electronics, nanoelectromechanical systems (NEMS), integration of opto… 

Figures from this paper

National Nanofabrication Centre at IISc Bangalore: A Chronicle of Design, Construction and Management of Cleanroom in Indian Context
We present the evolution of the state-of-the-art multiuser, open access, Nanofab facility at the Indian Institute of Science Bangalore. The process behind the design and execution of the cleanroom