Broadband Permittivity Measurements of High Dielectric Constant Films

@article{Obrzut2005BroadbandPM,
  title={Broadband Permittivity Measurements of High Dielectric Constant Films},
  author={Jan Obrzut and Aleksei Anopchenko and Ryusuke Nozaki},
  journal={2005 IEEE Instrumentationand Measurement Technology Conference Proceedings},
  year={2005},
  volume={2},
  pages={1350-1353}
}
Our investigation concerns measuring broadband dielectric permittivity and loss tangent of thin film high dielectric constant dielectric materials at microwave frequencies. The measurements are made in an APC-7 coaxial configuration where the test specimen represents a load terminating an air-filled coaxial transmission line. In contrast to conventional lumped capacitance approximations, the parallel plate capacitor filled with a dielectric film is treated as a distributed component consisting… 

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TDR permittivity measurements of dielectric films

  • J. ObrzutR. Nozaki
  • Physics
    2006 IEEE Instrumentation and Measurement Technology Conference Proceedings
  • 2006
We describe a time-domain reflectometry (TDR) technique to measure the dielectric permittivity of film materials with enhanced dielectric constant. The test specimen consists of a planar capacitor

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