Broadband Permittivity Measurements of High Dielectric Constant Films

  title={Broadband Permittivity Measurements of High Dielectric Constant Films},
  author={Jan Obrzut and Aleksei Anopchenko and Ryusuke Nozaki},
  journal={2005 IEEE Instrumentationand Measurement Technology Conference Proceedings},
Our investigation concerns measuring broadband dielectric permittivity and loss tangent of thin film high dielectric constant dielectric materials at microwave frequencies. The measurements are made in an APC-7 coaxial configuration where the test specimen represents a load terminating an air-filled coaxial transmission line. In contrast to conventional lumped capacitance approximations, the parallel plate capacitor filled with a dielectric film is treated as a distributed component consisting… 

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